高质量单层石墨烯的制备优化工艺

Optimization of Processing Parameters for High-Quality Monolayer Graphene

  • 摘要: 针对商用铜箔表面粗糙、成核不均一等问题,构建一套适用于常压化学气相沉积(APCVD)生长高质量、单层主导石墨烯的前处理与工艺优化体系,为后续器件及电化学应用提供可重复的基底处理路线。采用磷酸/PE4300电化学抛光结合3.5% HCl和3% HNO3混酸清洗,优化抛光时间及抛光液复用次数,并系统考察生长温度、退火时间和生长时间对石墨烯结构与表面化学状态的影响,利用SEM、拉曼和XPS进行表征。结果显示:抛光30 min并混酸清洗后铜箔表面最为平整致密,抛光液可稳定复用约3~5次;在1 080 ℃退火30 min、生长50 min条件下,获得D峰较弱且IG/I2D < 0.5的单层主导石墨烯,膜层连续性和均匀性显著提高。通过磷酸/PE4300电化学抛光与混酸清洗相结合,并协同优化生长温度等参数,可显著提升商购铜箔上APCVD生长所得石墨烯的结构完整性和层数均匀性,为后续太阳能电池等光伏器件中石墨烯透明电极及相关电化学应用提供稳定、可复现的工艺路线。

     

    Abstract: Commercial Copper foils typically exhibit surface roughness and non-uniform nucleation, which make it difficult to reproducibly grow high-quality monolayer-dominant graphene by atmospheric pressure chemical vapor deposition (APCVD). In this paper, a pretreatment and process optimization strategy for APCVD growth of high-quality graphene on commercial Cu foils is established, aimed at providing a reliable substrate preparation route for subsequent device and electrochemical applications, including graphene transparent electrodes in solar cells and other photovoltaic devices. A phosphoric acid/PE4300 electropolishing system is combined with mixed-acid cleaning in 3.5% HCl and 3% HNO3 to optimize polishing time and the reuse number of the electrolyte. On this basis, the effects of growth temperature, annealing time, and growth time on the graphene structure and surface chemical state are systematically investigated using SEM, Raman spectroscopy, and XPS. The results show that: after 30 min of electropolishing followed by mixed-acid cleaning, the Cu surface becomes the flattest and most compact, and the polishing solution can be stably reused about 3~5 times. Under optimized APCVD conditions of 1080 ℃ with a 30 min anneal and 50 min growth, the resulting graphene exhibits a weak D band and IG/I2D < 0.5, indicating monolayer-dominant films with markedly improved continuity and uniformity. These results demonstrate that combining phosphoric acid/PE4300 electropolishing with mixed-acid cleaning and coordinated optimization of growth parameters significantly enhances the structural integrity and layer-number uniformity of APCVD graphene on commercial Cu foils, providing a stable and reproducible process route for graphene transparent electrodes in solar cells and related electrochemical applications.

     

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